SEC Comment Letter for AXCELIS TECHNOLOGIES INC (ACLS) (CIK 0001113232) (ACLS) — Apr 6, 2009
AXCELIS TECHNOLOGIES INC (ACLS) (CIK 0001113232)
Date: April 6, 2009 · CIK: 0001113232 · Accession: 0000000000-09-017850
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File numbers found in text: 000-30941
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UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
WASHINGTON, D.C. 20549
DIVISION OF
CORPORATION FINANCE
Mail Stop 3030
April 6, 2009
VIA U.S. MAIL
Mr. Stephen G. Bassett Axcelis Technologies, Inc. Executive Vice President and Chief Financial Officer 108 Cherry Hill Drive Beverly, MA 01915
RE: Axcelis Technologies, Inc.
Form 10-K for the fiscal year ended December 31, 2007
Filed March 17, 2008 File No. 000-30941
Dear Mr. Bassett:
We have completed our review of your Form 10-K and related filings and do not, at this
time, have any further comments. S i n c e r e l y , B r i a n C a s c i o A c c o u n t i n g B r a n c h C h i e f